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Exploring the Potential of High Power Impulse Magnetron Sputtering for Tailoring the Chemical Composition and the Properties in Metal Oxynitride Films
Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Kostas Sarakinos
Doi: 10.2174/9781608051564113010007
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Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Filipe Vaz,Nicolas Martin,Martin Fenker
Doi: 10.2174/9781608051564113010018
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Journal: Recent Patents on Materials Science
Volume: 8 Issue: 3 Year: 2015 Page: 265-269
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