Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications

Author(s): Filipe Vaz, Nicolas Martin and Martin Fenker

DOI: 10.2174/9781608051564113010018

Subject Index

Pp: 342-345 (4)

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Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications

Subject Index

Author(s): Filipe Vaz, Nicolas Martin and Martin Fenker

Pp: 342-345 (4)

DOI: 10.2174/9781608051564113010018

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