Abstract
TFTs with large field-effect mobility, low threshold voltage, sharp subthreshold swing, small leakage current, good uniformity, high stability and reliability are highly desired for high resolution active matrix OLED application. The three most popular technologies for the TFT backplane are a-Si TFT technology, LTPS technology and metal oxide TFT technology. There also exist some promising compounds TFTs, such as GaN, MoS2 TFTs, and so on. The main properties of these technologies will be introduced and studied in this chapter.
Keywords:
Amorphous silicon, Compound, Excimer laser crystallization, Gallium nitride, Metal induced crystallization, Metal oxide, Polycrystalline silicon, Solid phase crystallization, Thin film transistor.