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SHS investigation development is considered from the geographical and historical viewpoint. 3 stages are described. Within Stage 1 the work was carried out in the Department of the Institute of Chemical Physics in Chernogolovka where the scientific discovery had been made. At Stage 2 the interest to SHS arose in different cities and towns of the former USSR. Within Stage 3 SHS entered the international scene. Now SHS processes and products are being studied in more than 50 countries.
Abstract
A two-stream model which describes impurity flux and point defect flux independently has been proposed. Equation for point defect flux gives macroscopic information about the impurity flux equation, such as enhanced diffusion coefficient and time duration of TED. The model also accommodates the ramp up process where enhanced diffusion and time duration parameters become variable. This simple model can be controlled and tuned simply and gives us prominent features of TED.
Keywords:
Ion implantation, transient enhanced diffusion, two-stream model, point defect, diffusion coefficient, pairing, damage, annealing, electric field, interstitial Si, vacancy, intrinsic carrier concentration, solid solubility, dose, amorphous/crystal interface, (311) defect, diffusion length, dislocation loop.
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Authors:Bentham Science Books