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SHS investigation development is considered from the geographical and historical viewpoint. 3 stages are described. Within Stage 1 the work was carried out in the Department of the Institute of Chemical Physics in Chernogolovka where the scientific discovery had been made. At Stage 2 the interest to SHS arose in different cities and towns of the former USSR. Within Stage 3 SHS entered the international scene. Now SHS processes and products are being studied in more than 50 countries.
Abstract
In this section, we consider reaction between impurity, point defects, and charges in diffusion phenomenon and diffusion equations for both of impurity and point defects. There are many levels of sophistication of treatment of the interaction of impurity and point defects. We perform approximations step by step, and derive diffusion models in various supplication levels.
Keywords:
Ion implantation, diffusion, transient enhanced diffusion, pairing, point defects, diffusion flux, diffusivity, thermal equilibrium, electric field, mobility, Boltzmann constant, Einstein relationship, electron, hole, interstitial Si, vacancy, balance equation, five stream model, three stream model.
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Authors:Bentham Science Books