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SHS investigation development is considered from the geographical and historical viewpoint. 3 stages are described. Within Stage 1 the work was carried out in the Department of the Institute of Chemical Physics in Chernogolovka where the scientific discovery had been made. At Stage 2 the interest to SHS arose in different cities and towns of the former USSR. Within Stage 3 SHS entered the international scene. Now SHS processes and products are being studied in more than 50 countries.
Abstract
Solid solubility is not a limiting factor for the maximum activation of impurities during solid phase epitaxial recrystallization (SPER). However, activation is limited to the maximum value of about 2x1020 cm-3 during SPER. A concept of the isolated impurity that has no neighbor impurities with a certain lattice range is introduced. The impurities react with neighbor impurities to form clusters, and only the isolated impurities can be active. The isolated impurity concentration has the maximum concentration at the total impurity concentration of about 1021 cm-3, and it decreases with a further increase in total impurity concentration.
Keywords:
Ion implantation, solid solubility, solid phase epitaxy, phosphorus, activation, isolated impurity, point defects, thermal equilibrium, shallow junction, cluster, amorphous layer, sheet resistance, annealing, furnace annealing, reverse annealing, spreading resistance.
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Authors:Bentham Science Books