Abstract
SHS investigation development is considered from the geographical and historical viewpoint. 3 stages are described. Within Stage 1 the work was carried out in the Department of the Institute of Chemical Physics in Chernogolovka where the scientific discovery had been made. At Stage 2 the interest to SHS arose in different cities and towns of the former USSR. Within Stage 3 SHS entered the international scene. Now SHS processes and products are being studied in more than 50 countries.
Abstract
Ion implantation profiles are expressed by the Pearson function with first, second, third and fourth moment parameters of Rp , ΔRp , γ , and β. We can derive an analytical model for these profile moments by solving a Lindhard-Scharf-Schiott (LSS) integration equation using perturbation approximation. This analytical model reproduces Monte Carlo data which were well calibrated to reproduce a vast experimental database. The extended LSS theory is vital for instantaneously predicting ion implantation profiles with any combination of incident ions and substrate atoms including their energy dependence.
Keywords:
Ion implantation, LSS theory, amorphous, Monte Carlo, nuclear stopping power, electron stopping power, range, projected range, skewness, kurtosis, lateral straggling, Thomas-Fermi potential, ZBL potential, nuclear cross section, electron cross section, cross section.
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Authors:Bentham Science Books