Abstract
SHS investigation development is considered from the geographical and historical viewpoint. 3 stages are described. Within Stage 1 the work was carried out in the Department of the Institute of Chemical Physics in Chernogolovka where the scientific discovery had been made. At Stage 2 the interest to SHS arose in different cities and towns of the former USSR. Within Stage 3 SHS entered the international scene. Now SHS processes and products are being studied in more than 50 countries.
Abstract
Pearson function is commonly used to express ion implantation profiles based on its four moments. Pearson function is not the unique one that uses the given four moments. Edgeworth polynomial is a function that is also generated using the four moments or more. We explain the model in this section, and express some experimental data with this model.
Keywords:
Ion implantation, Edgeworth polynomial, Hermete polynomial, kurtosis, moment, characteristic function, exponential function, Hermete polynomial, Gaussian function, central limit theorem, cumulants, standard deviation, SIMS, Sb, Pearson function.
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Authors:Bentham Science Books