Abstract
SHS investigation development is considered from the geographical and historical viewpoint. 3 stages are described. Within Stage 1 the work was carried out in the Department of the Institute of Chemical Physics in Chernogolovka where the scientific discovery had been made. At Stage 2 the interest to SHS arose in different cities and towns of the former USSR. Within Stage 3 SHS entered the international scene. Now SHS processes and products are being studied in more than 50 countries.
Abstract
The interactions between incident ion and substrate atoms are classical physical subjects. Ions lose its initial accelerated energy through the interaction between electron cloud and nuclei. The process is described with fundamental atomic properties such as atomic number and mass. Therefore, the model accommodates any combination of incident atom as well as the substrate composed of various kinds of atoms. We show the detail derivation process of nuclei and electronic stopping power models.
Keywords:
Ion implantation, nuclear stopping power, electronic stopping power, two-body collision, laboratory system, center of mass system, elastic collision, Bohr speed, Bethe model, Firsov, Lindhard model, Thomas-Fermi potential, Poisson equation, Coulomb potential, channeling, damage, amorphous layer.
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Authors:Bentham Science Books