Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications

Author(s): Martin Fenker

DOI: 10.2174/9781608051564113010014

Properties of Oxynitride Thin Films for Biomedical Applications

Pp: 254-264 (11)

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Abstract

SHS investigation development is considered from the geographical and historical viewpoint. 3 stages are described. Within Stage 1 the work was carried out in the Department of the Institute of Chemical Physics in Chernogolovka where the scientific discovery had been made. At Stage 2 the interest to SHS arose in different cities and towns of the former USSR. Within Stage 3 SHS entered the international scene. Now SHS processes and products are being studied in more than 50 countries.

Abstract

Several biomedical coatings on the basis of oxynitride compounds have been studied in the last 20 years. Published results will be presented on TiNbON, NbON, TiON and SiON. These coatings have been deposited by PVD methods, like cathodic arc evaporation and plasma immersion ion implantation and deposition. The aim of the studies was to improve the biomedical parts with respect to biocompatibility, corrosion resistance and mechanical strength, like hardness or wear resistance. The coatings have been characterized by elemental depth profiling, X-ray diffraction, nanohardness and wear tests. For SiON the platelet adhesion test and the enzyme-linked immunoassay method have been used. The latter two methods have proven that SiON has a better blood compatibility compared to low-temperature isotropic pyrolytic carbon (LTIC). Hence, SiON is suggested as a viable coating in blood-contacting medical products. Finally, the patent situation about oxynitride coatings for biomedical usage has been analyzed and will be briefly discussed.

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