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SHS investigation development is considered from the geographical and historical viewpoint. 3 stages are described. Within Stage 1 the work was carried out in the Department of the Institute of Chemical Physics in Chernogolovka where the scientific discovery had been made. At Stage 2 the interest to SHS arose in different cities and towns of the former USSR. Within Stage 3 SHS entered the international scene. Now SHS processes and products are being studied in more than 50 countries.
Abstract
Sputtering is one of the most widely used techniques for deposition of thin films. This chapter reviews the physical foundations of sputtering in a plasma and its application to the deposition of thin films. Different sputtering techniques are described and their advantages and disadvantages are highlighted.
Keywords:
Sputtering, plasma, glow discharge, thin films, magnetron cathode, ion beam, deposition, targets, ionization, gases
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Authors:Bentham Science Books