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Micro and Nanosystems

Author(s): Salah Eldeen Osman and Musaab Zarog*

DOI: 10.2174/1876402911666190208162346

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Optimized V-Shaped Beam Micro-Electrothermal Actuator Using Particle Swarm Optimization (PSO) Technique

Page: [62 - 67] Pages: 6

  • * (Excluding Mailing and Handling)

Abstract

Background: Electrothermal microactuators are very promising for wide range of Microelectromechanical Systems (MEMS) applications due to the low voltage requirement and large force produced.

Method: A new optimized V-beam electrothermal micro actuator was implemented in variable optical attenuator. In this work, Particle Swarm Optimization (PSO) technique is proposed to design the Vshaped beam.

Result: The approach has successfully improved both angular displacement & output force of the microactuator. Entropy generation rate was used as optimization criteria.

Keywords: PSO, entropy, variable optical attenuator, microactuators, RF MEMS, genetic algorithms.

Graphical Abstract

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