Abstract

Piezoelectric micro-power generator (PMPG) converts mechanical vibration energy into electric energy from human body via piezoelectric effects. In cardiac pacemakers, the use of PMPG eliminates the need for a traditional lithium iodide battery replacement. This paper covers fabrication process development of PMPG that is able to harvest the human body mechanical vibration to be converted into usable electrical power in low frequency range (1-100) Hz. The PMPG device developed has 10 m SU8 proof mass, 200nm Au /20 nm Cr interdigitated electrode, 1.5 µm functioning PZT layer and 200 nm Si₃N₄ on 10 µm Si substrate. The Fabricated PMPG vibrate at 61 Hz with power density of 0.29 W/cm³ and can supply 3.33AC voltage, 2.19V DC voltage to the final load. The PMPG is suitable to power most of small electronic devices including cardiac pacemaker at frequency below 100 Hz.

Keywords: Biomedical devices, lead zirconate titanate (PZT), Low frequency generator, piezoelectric micro power generator (PMPG), RF sputtering.