Abstract

Over the past two decades, scientists and researchers have successfully developed MEMS (Micro-Electro- Mechanical Systems) technology and its applications that provide a stepping stone for nanotechnology and nanostructure fabrication. Nanostructured devices, which have higher efficiency, less weight and lower power consumption, have been applied in the fields of electronics, chemistry, energy, environmental science and medicine. This patent review focuses on novel nanostructure fabrication methods and nanostructure devices applied in nanofluidics and nanomedicine. We can reasonably expect that the number of nanostructure patents will continue to grow, especially in the fields of biomedical science and energy.

Keywords: nanofluidics, Nanostructrued Devices, Nanofabrication Methods, Nanomedicine, (Micro-Electro- Mechanical Systems), nanolithography techniques, electron-beam (e-beam) lithography, polysilicon pattern, hexahedral crystalline particles, silane-coupling agents, nanoimprinting lithography, anisotropic crystalline particle, UV-curable epoxy, SEM image