Abstract

Background: In recent years, there has been an increasing demand for metal microstructural devices in fields such as biomedicine, aerospace, and precision machinery. The final step in the processing of microcomponents is the polishing process, which aims to eliminate surface defects and ensure stable mechanical performance of the structural components.

Objective: By analyzing and discussing recent patents related to microstructure surface polishing, valuable insights can be gained, and future research prospects can be provided.

Methods: Through a comprehensive study of various patents concerning polishing techniques, this paper aims to summarize the advancements made in microstructure surface polishing technology. Results: With the increasing demand for the application of microstructure devices, microstructure polishing technology has become more and more important. Microstructure polishing technology can effectively improve the quality of microstructure devices and ensure the high quality and efficiency of the products.

Conclusion: By elucidating the characteristics of polishing and emphasizing the significance of microstructure surface polishing, it is concluded that ultra-precision polishing and nano-polishing represent key directions for future development in this field.

Keywords: Microstructural, micromachining, ultraprecision machining, polishing technique, patent