Background and Objective: Piezoelectric energy harvesting is an emergent research area for unobtrusive power supply for fully autonomous micro-scale devices.
Methods: The method of energy harvesting is to utilize waste ambient mechanical vibrations to generate electrical energy through the piezoelectric effect. Results and Conclusion: The present work highlights the major advances made in the field of micro- electromechanical systems based on piezoelectric energy harvester on extracting ambient vibrations and converting them into usable electric power. The present study explores energy harvesting approaches for portable electronics and self-powered wireless network nodes. The performance matrices like device physics, volume, operating frequencies, design and materials have been thoroughly analyzed in this work. Conventional cantilever fabrication steps have also been discussed. Finally, guidelines for future research and performance enhancements in the field of Piezoelectric Energy Harvesting (PEH) at micro scale have been discussed.Keywords: Energy harvesting, mems, piezo-mems, piezoelectric energy harvesting, vibration-based harvesting, ambient vibrations, fabrication of cantilever, energy harvesting circuitry.