Abstract

Objective: This paper presents a multi-objective design optimization of MEMS disk resonator using two techniques.

Methods: Determining the optimized dimensions of disk resonator for a particular resonance frequency so as to achieve higher quality factor and lower motional resistance is attempted. One technique used is constraint-based multi-objective optimization using the interior-point algorithm. The second technique is based on multi-objective genetic algorithm.

Results: The algorithms are implemented using MATLAB. The two techniques of optimization are compared.

Conclusion: The developed optimization methods can provide faster design optimization compared to full-wave simulators resulting in significant reduction of design time.

Keywords: MEMS disk resonator, design optimization, multi-objective optimization, interior point method, constrained optimization, genetic algorithm, resonance frequency, quality factor, motional resistance.